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Spin Coating Process Theory

Author:Glichn Date:8/21/2011 8:20:42 AM
Spin Coating Process Theory
Spin coating has been used for several decades for the application of thin films. A typical process involves depositing a small puddle of a fluid resin onto the center of a substrate and then spinning the substrate at high speed (typically around 3000 rpm). Centripetal acceleration will cause the resin to
spread to, and eventually off, the edge of the substrate leaving a thin film of resin on the surface. Final film thickness and other properties will depend on the nature of the resin (viscosity, drying rate, percent solids, surface tension, etc.) and the parameters chosen for the spin process. Factors such as final
rotational speed, acceleration, and fume exhaust contribute to how the properties of coated films are defined.
One of the most important factors in spin coating is repeatability. Subtle variations in the parameters that define the spin process can result in drastic variations in the coated film.