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Spin Coating Process Troubleshooting

Author:Glichn Date:8/21/2011 9:01:42 AM
Spin Coating Process Troubleshooting
 
Spin coater
As explained previously, there are several major factors affecting the coatingprocess. Among these are spin speed, acceleration, spin time and exhaust.
Process parameters vary greatly for different resin materials and substrates sothere are no fixed rules for spin coat processing, only general guidelines.
These are explained in the “Spin Coating Process Description” section. Followingis a list of issues to consider for specific process problems.
 
Film too thin
Spin speed too high                 Select lower speed
Spin time too long                   Decrease time during high speed step
Inappropriate choice of resin material  Contact resin manufacturer
 
Film too thick
Spin speed too low                   Select higher speed
Spin time too short                   Increase time during high speed step
Exhaust volume too high              Adjust exhaust lid or house exhaust damper
Inappropriate choice of resin material   Contact resin manufacturer
 
Air bubbles on wafer surface
Air bubbles in dispensed fluid (resin)
Dispense tip is cut unevenly or has burrs or defects
 
Comets, streaks or flares
Fluid velocity (dispense rate) is too high
Spin bowl exhaust rate is too high
Resist sits on wafer too long prior to spin
Spin speed and acceleration setting is too high
Particles exist on substrate surface prior to dispense
Fluid is not being dispensed at the centerof the substrate surface
 
Swirl pattern
Spin bowl exhaust rate is too high
Fluid is striking substrate surface off center
Spin speed and acceleration setting is too high
Soin time too short
 
Center circle (Chuck Mark)
If the circle is the same size as the spin chuck,switch to a Delrin spin chuck
 
Uncoated Areas
Insufficient Dispense Volume
 
Pinholes
Air bubbles
Particles in fluid
Particles exist on substrate surface prior to dispense
 
 
Poor reproducibility
Variable exhaust or ambient conditions            Adjust exhaust lid to fully closed
Substrate not centered properly                 Center substrate before operation
Insufficient dispense volume                    Increase dispense volume
Inappropriate application of resin material        Contact resin manufacturer
Unstable balance in speed / time parameters     Increase speed / decrease time orvisa versa
 
Poor film quality
Exhaust volume too high                            Adjust exhaust lid or house exhaustdamper
Acceleration too high                               Select lower acceleration
Unstable balance in speed / time parameters          Increase speed / decrease time or visaversa
Insufficient dispense volume                         Increase dispense volume
Inappropriate application of resin material             Contact resin manufacturer